evaporation on this system including, crucible selection, film thickness, ebeam gun ramping and shutter openclose, deposition rate. Please refer to the following excerpts from the This system is a mostly MANUAL system. Most parameters need to be adjusted by the user. Only highvacuum compatible samples are permitted in this system. Zinc, brass, plastic substrates, tape (expect for Nano3 supplied Temescal BJD1800 EBeam Evaporator EBeam evaporation facility General overview of Ebeam facility EBeam evaporation is a physical vapor deposition (PVD) technique whereby an intense, Luidia, Inc.
makes eBeam technology interactive whiteboard and collaboration solutions for education and business. Page Coral Name: EBeam 2 Equipment Information Sheet CNST NanoFab Denton Electron Beam Evaporator# 2 TOOL CONTACT INFORMATION Phone Extension Email NANOSYSTEM FABRICATION FACILITY (NFF), HKUST Version 1.
0 Page 1 of 18 Standard Operating Manual AST Peva450I EBeam Evaporation System CHA EBeam Evaporator Operation Manual. Description: The CHA is a multipocket electron beam evaporator. It is a high vacuum (106 Torr) e beam evaporation system that can be used to deposit metals and dielectrics. Lesker PVD75 EbeamThermal Evaporator Standard Operating Procedure.
Updated on. Note: In standby, HV power supply for ebeam behind the right door is OFF. This tool is a dual ebeamthermal evaporator.
The present instructions refer only to the thermal evaporation process (low voltage source, or source 2). document: cha electron beam evaporator system operating procedures version: 1.
0 11 Turn on MAINS power by moving switchbreaker to ON position (SEB06 ebeam EBeam Evaporator Instructions THANK YOU for your purchase of MTS' EBeam Evaporator system. It is the finest of its kind available. We appreciate the confidence you have placed in our company. We encourage your comments and suggestions on this product and its manual.
E beam evaporator manual read this manual carefully prior to assemblingmounting your